Universidad de Castilla~La Mancha

Universidad de Castilla-La Mancha

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Grupo de investigación:
Micro-Nano Sistemas

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Publicaciones

Autores: J. Olivares, J. Malo, S. González, E. Iborra, I. Izpura, M. Clement, A. Sanz Hervás, J. L. Sánchez-Rojas, P. Sanz
Título: “Tunable mechanical resonator with aluminium nitride piezoelectric actuation”
Revista: MEMS, MOEMS, and Micromachining II, Proceedings of the SPIE vol. 6186 (2006) pp. 61860K-1-12

Autores: Javier Vazquez , Pablo Sanz, Jose Luis Sanchez-Rojas
Título: Behaviour of forbidden modes in the impedance characterization and modeling of piezoelectric microcantilevers
Revista: Sensors and Actuators A, Volumen 136, Páginas 417- 425, (2006)

Autores: P Sanz, J Hernando, J Vázquez and J L Sánchez-Rojas
Título: Laser vibrometry and impedance characterization of piezoelectric microcantilevers
Revista: Journal of Micromechanics and Microengineering. Vol.17, Páginas 931- 937, (2007)

Autores: Sanz-Gonzalez P, Hernando J, Vazquez J, Sanchez-Rojas JL
Título: Resonance frequencies and modal shape characterization of piezoelectric microcantilevers - art. no. 65890L
Revista: Smart Sensors, Actuators, and MEMS III Book Series: PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS (SPIE) Volume: 6589 Pages: L5890-L5890 Published: 2007

Autores: Plata MR, Hernando J, Zougagh M, Sanchez-Rojas JL et al.
Título: Characterization and analytical validation of a microcantilever-based sensor for the determination of total carbonate in soil samples
Revista: SENSORS AND ACTUATORS B-CHEMICAL Volume: 134 Issue: 1 Pages: 245-251 Published: AUG 28 2008

Autores: Hernando J, Sanchez-Rojas JL, Gonzalez-Castilla S, et al.
Título: Simulation and laser vibrometry characterization of piezoelectric AIN thin films
Revista: Source: JOURNAL OF APPLIED PHYSICS Volume: 104 Issue: 5 Article Number: 053502 Published: SEP 1 2008

Autores: U. Schmid, J. L. Sánchez-Rojas
Título: Piezoelectric Properties of Sputtered AlN Thin Films and Their Applications
Revista: Advances in Science and Technology Vol. 54 (2008) pp 41-49

Autores: J. Vázquez, M.A. Rivera, J. Hernando, J.L. Sánchez-Rojas
Título: Dynamic response of low aspect ratio piezoelectric microcantilevers actuated in different liquid environments
Revista: Journal of Micromechanics and Microengineering Volumen: 19 Páginas, inicial: 015020 final: (9pp) Fecha: 28-11-2008 Lugar de publicación: Bristol, Reino Unido

Autores: Javier Vázquez, José Luis Sánchez-Rojas
Título: DNA accumulation on single-anode microelectrode structures and its application in active microarray layout design
Revista:
Revista: Current Applied Physics
Volumen: 9 Páginas, inicial: 333 final: 345
Fecha: 29-03-2008
Lugar de publicación: Ámsterdam, Holanda

Autores: José-Luis Sánchez-Rojas, Jorge Hernando, Abdallah Ababneh, Ulrich Schmid, Jimena Olivares, Marta Clement, Enrique Iborra
Título: Advanced Determination of Piezoelectric Properties of AlN Thin Films on Silicon Substrates
Revista: IEEE Transactions Ultrasonics. Digital Object Identifier (DOI): 0.1109/ULTSYM.2008.0218; pp.903-906.

Autores: Sanchez-Rojas, J.L.; Hernando, J.; Donoso, A.; Bellido, J.C.; Gutierrez, L.M.; Ababneh, A.; Seidel, H.; Schmid, U.
Título: Piezoelectric modal sensors/actuators based on microplates applying surface electrode patterning
Revista: Proceedings Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International 21-25 June 2009 Page(s):2346 - 2349 Digital Object Identifier 10.1109/SENSOR.2009.5285443

Autores: J. Hernando, J.L. Sánchez-Rojas, A. Ababneh, H. Seidel, Ü. Söekmen, E.Peiner, U. Schmid.
Título: “Characterization and simulation of high-quality AlN-actuated resonant suspended beams”
Revista: Proc. SPIE, Vol. 7362, 73620K (2009); doi:10.1117/12.821636

Autores: T. Manzaneque, J. Hernando, J. Rodríguez-Aragón, A. Ababneh, H. Seidel, U. Schmid, J.L. Sánchez-Rojas
Título: “Analysis of the quality factor of piezoelectric-actuated micro-resonators”
Revista: Proc. SPIE, Vol. 7362, 73620A (2009); doi:10.1117/12.821651

Autores: M. J. Oliver, J. Hernando, J. Olivares, M. Clement, A. Ababneh, U. Schmid, J.L: Sánchez-Rojas
Título: “Sputtered polycrystalline AlN as a platform for biofunctionalized devices”
Revista: Proc. SPIE, Vol. 7362, 736208 (2009); doi:10.1117/12.821653

Autores: A. Ababneh, G. Marchand, H. Seidel, J. Hernando, J.L. Sánchez-Rojas, Ü. Söekmen, E.Peiner, U. Schmid
Título: “Comparison between AlN thin films with different crystal orientations for MEMS applications”
Revista: Proc. SPIE, Vol. 7362, 73621N (2009); doi:10.1117/12.821858

Autores: T. Manzaneque, J. Hernando, L. Rodríguez-Aragón, A. Ababneh, H. Seidel, U. Schmid and J. L. Sánchez-Rojas
Título: "Analysis Of The Quality Factor Of AlN-Actuated Micro-Resonators In Air And Liquid"
Revista: Microsystem Technologies, DOI 10.1007/s00542-009-1003-2. Springer. 2009

Autores: J Hernando1, J L Sánchez-Rojas1, U Schmid2, A Ababneh3, G Marchand3 and H Seidel3
Título: Characterization and displacement control of low surface-stress AlN-based piezoelectric micro-resonators
Revista: Microsystem Technologies, DOI 10.1007/s00542-009-1015-y. Springer. 2009

Autores: J L Sanchez-Rojas1, J Hernando1, A Donoso1, J C Bellido1, T Manzaneque1, A Ababneh2, H Seidel2 and U Schmid3
Título: Modal optimization and filtering in piezoelectric microplate resonators
Revista: J. Micromech. Microeng. 20 (2010) 055027 (7pp)